AOV produces thin film deposition systems that are each customized to meet the requirements of diverse customers.

Categorically, AOV's deposition systems utilize either the physical vapor deposition (PVD) or the chemical vapor deposition (CVD) methods.

PVD systems are further categorized as follows, all of which are in AOV's product line along with the CVD systems.

Distinctive features in high temperature substrate heating technique and stable motion control mechanism under high temperature and high atmospheric gas pressure environment of oxygen, nitrogen, argon, etc are valued highly by the users of our systems.

Whether it be a small PLD apparatus for R&D purpose or a large scale PLD system with a high power laser for production line, AOV produces and deploys them in the form of complete systems, consisting of laser, delivery optics and the film deposition system.

AOV produces thin film deposition systems that are each customized to meet the requirements of diverse customers.

[ Exhibition ]
Title : LASER & OPTICS 2009
Period : Jan. 28-30, 2009
Venue :TOKYO BIG SIGHT

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[ Exhibition ]
Title : VACUUM2008
Period : Sep. 10-12,2008
Venue :TOKYO BIG SIGHT

[ Exhibition ]
Exhibition Title:Micromachine/MEMS
Period : July 30-Aug 1,2008
Venue : TOKYO BIG SIGHT